Submitted by Greg Herman on Tue, 04/16/2019 - 08:03
Year: 
(2019)
Publication Type: 
Publications
Publication Text: 

“Effect of Oxygen on Thermal and Radiation Induced Chemistries in a Model Organotin Photoresist”, R.T. Frederick, J.T. Diulus, D.C. Hutchison, M. Nyman, G.S. Herman, ACS Applied Materials & Interfaces 11, 4514-4522

Project: 
High-Resolution Nanopatterning of Inorganic Resists