Title | In-situ characterization of aqueous-based hafnium oxide hydroxide sulfate thin films |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | Flynn, B, Kim, D, Clark, BL, Telecky, A, Árnadóttir, L, Szanyi, J, Keszler, DA, Herman, GS |
Journal | Surface and Interface Analysis |
Volume | 46 |
Issue | 4 |
Pagination | 210 - 215 |
Date Published | Jan-04-2014 |
URL | https://analyticalsciencejournals.onlinelibrary.wiley.com/doi/abs/10.1002/sia.5205 |
DOI | 10.1002/sia.5205 |
Short Title | Surf. Interface Anal. |