Oregon State University

Characterization

Alphastep 500 picture

The Alpha Step 500 is a scanning, contact profilometer used to measure step height (film thickness), waviness and surface roughness. The system measures thickness down to 500Å, with a maximum scan width of 10mm, and accommodates samples up to 150mm wide and 15mm thick. The profilometer has the ability to repeat a scan up to ten times automatically, as well as fit and level data.

Tencor Instruments
Alpha Step 500
Surface Profiler
Owen cleanroom
manuals (must be logged in)
Dr. John Wager

 

 

Picture of Kelvin Probe

Kelvin probe analysis is a surface analysis technique employed to evaluate the surface potential of a conducting sample. The surface potential is related to the work function of the sample. The KP Technology SKP5050 is operated in ambient conditions. The surface potential of a conducting sample is measured by KP analysis through the modulation of the electric field formed between the surface under analysis and a reference electrode.

KP Technology Ltd
SKP5050
Kelvin Probe
Owen cleanroom
Dr. John Wager

 

 

Picture of the Nanospec 4000

The Nanospec AFT 4000 uses reflectometry to measure film thickness based on interference effects.  The system can measure the thickness of dielectric thin films (i.e. oxides, nitrides, polysilicon, photoresist) on Silicon, down to 50nm.

Nanometrics
Nanospec AFT 4000
Automated film thickness and reflectivity measurement system
Owen cleanroom
manuals (must be logged in)
Dr. John Wager

 
Picture of the ellipsometer  

Geartner
Ellipsometer
Thickness Measurement System
Owen cleanroom
Dr. John Wager

 
Picture of the four point probe The Jandel Multi Height Probe is used to measure the resistivity of samples by the four point technique. The large base and adjustable height will accommodate a variety of sample shapes and sizes (Note: dummy probe should be installed to adjust height). The probehead pins are Tungsten Carbide with 1.00mm spacing, 100 micron radius tip, and 60+ grams spring loading. The current source maximum is 10mA, and the voltmeter discriminates to 10 microvolts.

Jandel Engineering LimitedJandel
Multi Height Probe with RM2 Resistivity Test Unit
Four point probe
Owen cleanroom
Dr. John Wager

 
Picture of the Axiotron microscope  

Axiotron
Optical microscope
Owen cleanroom
Dr. John Wager

 

 

                XRD

Picture of the Leica microscope  

Leica
INM 200
Optical microscope
Owen 333
Dr. John Conley

 

 

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