Oregon State University

Pulsed Laser Deposition

 

OSU constructed PLD in Dr. Janet Tate's lab. A joint OSU and Thermionics designed and built system. Turbo-pumped to a base pressure of 2 x 10-9 Torr, the vacuum system is load-locked and has target and substrate rotation(6-target carousel).   Substrate heating via quartz lamps to 700 C, and target-substrate distance is variable.  Inert gases and oxygen are introduced by an MKS mass flow controller with flow rate to 20 sccm during deposition to a level of 1 mTorr.  Pressures higher than 1 mTorr can be achieved by throttling the high vacuum gate valve.  The laser is a Compex 205 248 pulsed excimer laser (20 ns pulses, 1 - 10 Hz rep rate.)

Pulsed Laser Deposition

Weniger 475

Dr. Janet Tate

 

Picture of a Neocera PLD system located in Dr. Tate's lab. Neocera system. Turbo-pumped to a base pressure of 2 x 10-7 Torr, the vacuum system has target (6-target capability).   Substrate heating via resistive element to 900 C, and target-substrate distance is variable.  Inert gases and oxygen are introduced by an MKS mass flow controller with flow rate to 20 sccm during deposition to a level of 1 mTorr.  Pressures higher than 1 mTorr can be achieved by throttling the high vacuum gate valve. The laser, shared with the Thermionics system, is a Compex 205 248 pulsed excimer laser (20 ns pulses, 1 - 10 Hz rep rate.)

Neocera Pulsed Laser Deposition

Weniger 475

Dr. Janet Tate

 

Picture of PLD system located in Dr. Gibons lab. OSU constructed PLD system.

Pulsed Laser Deposition

Dearborn 300

Dr. Brady Gibbons

 

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