Oregon State University

Solution Thin-Film Deposition

 

Picture of the Tractix system in the Owen cleanroom

This system includes a 6000 rpm spin module with edge bead removal, a high temperature bake module, and an active cooling module along a linear track.  Four inch wafers are loaded automatically from a standard cassette.  Conversion for wafers up to six inch is possible.  Special carrier wafers are used to accommodate small substrates.  A touch screen GUI provides flexible recipe control.  Three separate cartridges dispense fluids onto the substrate.  The system is used for deposition of prompt inorganic condensation materials.

Site Services Inc.

Tractix

Track coating system

Owen cleanroom

manuals (must be logged in)

Dr. Doug Keszler

 

 

 

Picture of the Sonoplotter sstem in the Owen cleanroom The Sonoplotter is a micro pipet printer used to print and pattern devices.

Sonoplotter

Owen cleanroom

Dr. John Wager

 

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