Oregon State University

Sputter Deposition

 

OSU constructed magnetreon sputter deposition system in Owen cleanroom. OSU constructed magnetron sputter deposition system.

OSU Constructed

TANG

Magnetron Sputter Deposition System

Owen cleanroom

Dr. John Wager

 

CPA radio frequency sputter deposition system in Owen cleanroom CPA radio frequency sputter deposition system.

CPA

Radio Frequency Sputter Deposition

Owen Cleanroom

Dr. John Wager

 

OSU constructed radio frequency sputter deposition system in Owen cleanroom

This system incorporates electron beam, sputter and thermal deposition in one chamber.  An 8kW, six pocket rotary egun is used primarily for deposition of refractory metals.  Two 2” magnetrons are available for sputter deposition of chalcogenide materials.  In addition, the system is equipped with one thermal evaporation source.   The six inch substrate stage has heating to 850C, rotation, RF biasing and in situ adjustment of the source to substrate distance.  The system is load locked, and the chamber base pressure is <5e-8 Torr.  Process gas is Argon.

OSU Constructed

CDS

Multi technique physical vapor deposition system

Owen Cleanroom

Dr. John Wager

 

Orion 5 radio frequency sputter deposition system in Owen cleanroom The Orion 5 sputtering system is equipped with five magnetrons in an off axis, sputter up geometry.  The two inch magnetrons are driven by a 300W RF power supply with automatic matching network.  The substrate stage includes rotation, heating to 850C, and RF biasing.  Chamber base pressure is <5e-8 Torr, and the system is load locked.  Process gases include Argon and Oxygen. 

AJA International, Inc.

Orion 5

Sputter Deposition System

Owen Cleanroom

manuals(must be logged in)

Dr. John Wager

 

OSU constructed radio frequency sputter deposition system in Dr. Gibbon's lab. OSU constructed radio frequency sputter deposition system.

Radio Frequency Sputter Deposition

Dearborn 300

Dr. Brady Gibbons

 

OSU constructed radio frequency sputter system located in Dr. Gibbon's lab. OSU constructed radio frequency sputter system.

Radio frequency sputter deposition

Dearborn 300

Dr. Brady Gibbons

 

Sputter coater in Dr. Cann's lab. Sputter coater.

Sputter coater

 

Dr. Dave Cann

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