Submitted by Gustavo Albuquerque on Mon, 01/25/2016 - 14:30
Year: 
(2016)
Publication Type: 
Publications
Publication Text: 

“Thermal Stability of Amorphous Ta-Ni-Si Diffusion Barriers”, R.P. Oleksak, A. Devaraj, G.S. Herman, Materials Letters 164, 9-14

Project: 
Surface and Interfacial Characterization