Characterization of HafSOx inorganic photoresists using electron stimulated desorption
Submitted by Ryan Frederick on Fri, 04/08/2016 - 12:14
Year:
(2016)
Publication Type:
Publications
Publication Text:
“Characterization of HafSOx inorganic photoresists using electron stimulated desorption”, R.T. Frederick, G. S. Herman, Proceedings of SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97790I
Project:
High-Resolution Nanopatterning of Inorganic Resists
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