Submitted by Ryan Frederick on Fri, 04/08/2016 - 12:14
Year: 
(2016)
Publication Type: 
Publications
Publication Text: 

“Characterization of HafSOx inorganic photoresists using electron stimulated desorption”, R.T. Frederick, G. S. Herman, Proceedings of SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97790I

Project: 
High-Resolution Nanopatterning of Inorganic Resists