Submitted by Sheela Surisetty on Thu, 09/04/2014 - 00:25
Year: 
(2014)
Publication Type: 
Publications
Publication Text: 

"Characterization of high-resolution HafSOx inorganic resists", R.P. Oleksak, G. S. Herman, Proceedings of SPIE 9048, Extreme Ultraviolet Lithography V, 90483H

Project: 
High-Resolution Nanopatterning of Inorganic Resists