Submitted by Greg Herman on Thu, 08/30/2018 - 08:48
Year: 
(2018)
Publication Type: 
Publications
Publication Text: 

“Mechanistic Study of HafSOx Extreme Ultraviolet Inorganic Resists”, R.T. Frederick, J.M. Amador, D.A. Keszler, G.S. Herman, Journal of Physical Chemistry C 122, 16100-16112 

Project: 
High-Resolution Nanopatterning of Inorganic Resists