Submitted by Greg Herman on Tue, 09/24/2019 - 16:20
Year: 
(2019)
Publication Type: 
Publications
Publication Text: 

“Organotin carboxylate precursors for patterning: How structure influences reactivity and metal oxide formation”, M.C. Sharps, R.T. Frederick, M.L. Javitz, G.S. Herman, J.E. Hutchison, D.W. Johnson, Chemistry of Materials 31, 4840-4850 

Project: 
High-Resolution Nanopatterning of Inorganic Resists