Submitted by Ryan Frederick on Thu, 06/28/2018 - 09:13
Year: 
(2018)
Publication Type: 
Publications
Publication Text: 

“Surface characterization of tin-based inorganic EUV resists”, R.T. Frederick, J.T. Diulus, I. Lyubinetsky, D.C. Hutchison, M.R. Olsen, M. Nyman, G.S. Herman, Proceedings of SPIE 10586, Advances in Patterning Materials and Processes XXXV, 1058607.

Project: 
High-Resolution Nanopatterning of Inorganic Resists