Oregon State University

Atomic Layer Deposition


Picture of the Picosun atomic layer deposition system in the Owen cleanrrom.  


Picture of the Aradiance atomic layer deposition system in the Owen cleanroom.

The GEMSTAR is a benchtop atomic layer deposition system that accommodates up to 150mm diameter substrates, and 3D objects 25mm tall.  The system has five source lines and chamber heating to 300C.  Along with typical continuous flow processes, the GEMSTAR allows the pumping valve to be closed and opened during deposition to enhance conformal coating of high aspect ratio structures.

Arradiance, Inc.


ALD Benchtop System

Owen cleanroom

Dr. John Conley


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