Picture of the PE50 in the Owen cleanroom.

This Oxygen plasma tool is commonly referred to as an asher or descummer. It is used to remove organic and inorganic contamination, and to increase wettability and bond strength. The process shelf is a single 6.75” x 6.75” electrode driven by a 100W RF power source. A programmable logic controller provides automated system control.

Plasma Etch, Inc.
PE50XL
Plasma treatment system
Owen cleanroom
manuals (must be logged in)

 
Picture of the PE200 in the Owen cleanroom.

This tool is used for surface modification, surface treatment, and cleaning of substrates by exposure to an Oxygen plasma. Plasma generator is 300 Watts at 13.56 MHz. Three 13” x 16” processing electrodes accommodate large substrates, or batches of smaller samples.

Plasma Etch, Inc.
PE-200
Plasma treatment system
Owen cleanroom
manuals (must be logged in)
Dr. John Wager