OREGON STATE UNIVERSITY
Open search box
 |
OSU constructed magnetron sputter deposition system. |
|
OSU Constructed TANG Magnetron Sputter Deposition System Owen cleanroom Dr. John Wager |
|
 |
CPA radio frequency sputter deposition system. |
|
CPA Radio Frequency Sputter Deposition Owen Cleanroom Dr. John Wager |
|
 |
This system incorporates electron beam, sputter and thermal deposition in one chamber. An 8kW, six pocket rotary egun is used primarily for deposition of refractory metals. Two 2” magnetrons are available for sputter deposition of chalcogenide materials. In addition, the system is equipped with one thermal evaporation source. The six inch substrate stage has heating to 850C, rotation, RF biasing and in situ adjustment of the source to substrate distance. The system is load locked, and the chamber base pressure is <5e-8 Torr. Process gas is Argon. |
|
OSU Constructed CDS Multi technique physical vapor deposition system Owen Cleanroom Dr. John Wager |
|
 |
The Orion 5 sputtering system is equipped with five magnetrons in an off axis, sputter up geometry. The two inch magnetrons are driven by a 300W RF power supply with automatic matching network. The substrate stage includes rotation, heating to 850C, and RF biasing. Chamber base pressure is <5e-8 Torr, and the system is load locked. Process gases include Argon and Oxygen. |
|
AJA International, Inc. Orion 5 Sputter Deposition System Owen Cleanroom Dr. John Wager |
|
 |
OSU constructed radio frequency sputter deposition system. |
|
Radio Frequency Sputter Deposition Dearborn 300 Dr. Brady Gibbons |
 |
OSU constructed radio frequency sputter system. |
|
Radio frequency sputter deposition Dearborn 300 Dr. Brady Gibbons |
 |
Sputter coater. |
|
Sputter coater
Dr. Dave Cann |