OREGON STATE UNIVERSITY
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The Polaron Thermal Evaporator uses a standard resistive filament evaporation source, and a quartz bell jar deposition chamber. The tool incorporates a diffusion pump as the high vacuum pump and reaches a base pressure of < 5 E-5mbar. The tool is used for depositing aluminum. |
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Polaron thermal evaporator Owen cleanroom Dr. John Wager |
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The Veeco 7700 is a manually controlled thermal evaporator, equipped with water cooled feedthroughs, and capable current drive in the 220 Amp range. A high current switch enables sequential deposition of two materials, and a second power source allows a third material to be deposited, without breaking vacuum. Chamber base pressure is < 5 E-6 Torr range, and the system is equipped with a quartz crystal monitor for manual thickness control. This evaporator is used for metal deposition. |
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VEECO 7700 Series Thermal evaporator Owen cleanroom Dr. John Wager |
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This system incorporates electron beam, sputter and thermal deposition in one chamber. An 8kW, six pocket rotary egun is used primarily for deposition of refractory metals. Two 2” magnetrons are available for sputter deposition of chalcogenide materials. In addition, the system is equipped with one thermal evaporation source. The six inch substrate stage has heating to 850C, rotation, RF biasing and in situ adjustment of the source to substrate distance. The system is load locked, and the chamber base pressure is <5e-8 Torr. Process gas is Argon. |
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OSU Constructed CDS Multi technique physical vapor deposition system Owen Cleanroom Dr. John Wager |
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The Cooke thermal evaporator uses a standard resistive filament evaporation source, and a stainless steel bell jar deposition chamber. The tool incorporates a turbomolecular pump as the high vacuum pump and reaches a base pressure of ?????. The tool is used for depositing aluminum. |
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Cooke thermal evaporator Owen cleanroom Dr. John Wager |
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Schrader thermal evaporator. |
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Schrader thermal evaporator Weniger 4?? Dr. Janet Tate |
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VEECO thermal evaporator. |
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VEECO thermal evaporator Weniger 4?? Dr. Janet Tate
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The CV-164D Thermal Evaporator uses a standard resistive filament evaporation source, and a quartz bell jar deposition chamber. The tool incorporates a diffusion pump as the high vacuum pump and reaches a base pressure of < 2 E-6. The tool is used for depositing ????. |
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CV-164D Thermal Evaporator Dearborn 300 Dr. Brady Gibon |
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OSU constructed electron beam deposition system. |
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OSU constructed Ebeam Dr. Ethan Minot |
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This programmable logic controller (PLC) glove box is used for work that must be carried out in dry, inert Nitrogen ambient. The oxygen content is typically below 20 parts per million. The system is equipped with an antechamber for transfer of smaller items, and a large 600C vacuum oven for dehydration/baking, and to serve as a pass through for large items. The glove box is also equipped with a vacuum thermal evaporator for deposition of materials that cannot be exposed to Oxygen or moisture. |
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MBraun Labmaster 130, VOH-600Oven Glove box with oven and thermal evaporator Owen Cleanroom Dr. John Wager |
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