OREGON STATE UNIVERSITY
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The Alpha Step 500 is a scanning, contact profilometer used to measure step height (film thickness), waviness and surface roughness. The system measures thickness down to 500Å, with a maximum scan width of 10mm, and accommodates samples up to 150mm wide and 15mm thick. The profilometer has the ability to repeat a scan up to ten times automatically, as well as fit and level data. |
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Tencor Instruments |
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Kelvin probe analysis is a surface analysis technique employed to evaluate the surface potential of a conducting sample. The surface potential is related to the work function of the sample. The KP Technology SKP5050 is operated in ambient conditions. The surface potential of a conducting sample is measured by KP analysis through the modulation of the electric field formed between the surface under analysis and a reference electrode. |
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KP Technology Ltd |
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The Nanospec AFT 4000 uses reflectometry to measure film thickness based on interference effects. The system can measure the thickness of dielectric thin films (i.e. oxides, nitrides, polysilicon, photoresist) on Silicon, down to 50nm. |
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Nanometrics |
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Geartner |
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The Jandel Multi Height Probe is used to measure the resistivity of samples by the four point technique. The large base and adjustable height will accommodate a variety of sample shapes and sizes (Note: dummy probe should be installed to adjust height). The probehead pins are Tungsten Carbide with 1.00mm spacing, 100 micron radius tip, and 60+ grams spring loading. The current source maximum is 10mA, and the voltmeter discriminates to 10 microvolts. |
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Jandel Engineering LimitedJandel |
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Axiotron |
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Optical Microscope
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Leica |
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